TIME-RESOLVED ELLIPSOMETRY

被引：33

作者：

JELLISON, GE

LOWNDES, DH

机构：

来源：

APPLIED OPTICS | 1985年 / 24卷 / 18期

关键词：

D O I：

10.1364/AO.24.002948

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2948 / 2955

页数：8

共 22 条

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[5]

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[6]

Clarke D., 1971, POLARIZED LIGHT OPTI

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[8]

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[9] EFFECTS OF COMPONENT IMPERFECTIONS ON ELLIPSOMETER CALIBRATION [J].

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[10] AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW POLARIZATION MODULATION TECHNIQUE [J].

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