TUBULAR HOLLOW-CATHODE SPUTTERING ONTO SUBSTRATES OF COMPLEX SHAPE

被引：33

作者：

THORNTON, JA ^{[1
]}

HEDGCOTH, VL ^{[1
]}

机构：

[1] TELIC CORP,1631 COLORADO AVE,SANTA MONICA,CA 90404

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568631

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：93 / 97

页数：5

共 20 条

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