IMPROVEMENT OF INP CRYSTAL QUALITY ON GAAS SUBSTRATES BY THERMAL CYCLIC ANNEALING

被引:19
作者
HAYAFUJI, N [1 ]
KIMURA, T [1 ]
YOSHIDA, N [1 ]
KANENO, N [1 ]
TSUGAMI, M [1 ]
MIZUGUCHI, K [1 ]
MUROTANI, T [1 ]
IBUKI, S [1 ]
机构
[1] SETSUNAN UNIV, FAC ENGN, NEYAGAWA, OSAKA 572, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 10期
关键词
D O I
10.1143/JJAP.28.L1721
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L1721 / L1724
页数:4
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