AN ELECTROSTATIC IRIS FOR USE IN QUADRUPOLE SIMS INSTRUMENTS

被引：2

作者：

DOWSETT, MG

PARKER, EHC

KING, RM

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 4卷 / 01期

关键词：

D O I：

10.1016/0168-583X(84)90056-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：167 / 169

页数：3

共 11 条

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[2] EXPERIMENTAL-STUDY OF ELECTRODE MATERIALS FOR USE IN A COLD-CATHODE OXYGEN DISCHARGE [J].

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PARKER, EHC .

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[3]

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[4]

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[5]

PARKER EHC, 1983, 2ND EUR WORKSH MOL B

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Wittmaack K., 1973, International Journal of Mass Spectrometry and Ion Physics, V11, P23, DOI 10.1016/0020-7381(73)80052-X

[7] IMPROVED SECONDARY-ION EXTRACTION IN A QUADRUPOLE-BASED ION MICRO-PROBE [J].

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[8] HIGH-SENSITIVITY DEPTH PROFILING OF ARSENIC AND PHOSPHORUS IN SILICON BY MEANS OF SIMS [J].

WITTMAACK, K .

APPLIED PHYSICS LETTERS, 1976, 29 (09) :552-554

[9] PRIMARY-ION CHARGE COMPENSATION IN SIMS ANALYSIS OF INSULATORS [J].

WITTMAACK, K .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) :493-497

[10] DESIGN AND PERFORMANCE OF QUADRUPOLE-BASED SIMS INSTRUMENTS - A CRITICAL-REVIEW [J].

WITTMAACK, K .

VACUUM, 1982, 32 (02) :65-89

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