EFFECT OF CRYSTAL ORIENTATION ON PLASMA-GROWN OXIDES OF SILICON

被引:1
作者
BARLOW, KJ
KIERMASZ, A
ECCLESTON, W
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D O I
10.1049/el:19850101
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:142 / 143
页数:2
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