HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF X-RAY MULTILAYER STRUCTURES

被引：176

作者：

PETFORDLONG, AK

STEARNS, MB

CHANG, CH

NUTT, SR

STEARNS, DG

CEGLIO, NM

HAWRYLUK, AM

机构：

[1] ARIZONA STATE UNIV,DEPT PHYS,TEMPE,AZ 85287

[2] BROWN UNIV,DIV ENGN,PROVIDENCE,RI 02912

[3] UNIV CALIF LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 04期

关键词：

D O I：

10.1063/1.338122

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1422 / 1428

页数：7

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