ABSOLUTE DENSITIES OF REACTION-PRODUCTS FROM PLASMA-ETCHING OF QUARTZ

被引：30

作者：

VANVELDHUIZEN, EM

BISSCHOPS, T

VANVLIEMBERGEN, EJW

VANWOLPUT, JHMC

机构：

[1] EINDHOVEN UNIV TECHNOL,DEPT PHYS,5600 MB EINDHOVEN,NETHERLANDS

[2] EINDHOVEN UNIV TECHNOL,DEPT CHEM ENGN,5600 MB EINDHOVEN,NETHERLANDS

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572891

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2205 / 2208

页数：4

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