ROLE OF STEP AND TERRACE NUCLEATION IN HETEROEPITAXIAL GROWTH-MORPHOLOGY - GROWTH-KINETICS OF CAF2/SI(111)

被引：32

作者：

HESSINGER, U

LESKOVAR, M

OLMSTEAD, MA

机构：

[1] Department of Physics, University of Washington, Box 35-1560, Seattle

来源：

PHYSICAL REVIEW LETTERS | 1995年 / 75卷 / 12期

关键词：

D O I：

10.1103/PhysRevLett.75.2380

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The thickness uniformity and the spatial distribution of lattice relaxation in thin (<8 nm) CaF2/Si(111) films, observed with photoelectron spectroscopy and transmission electron microscopy, are seen to depend strongly on the initial nucleation kinetics. We develop a general modal for heteroepitaxial growth that explains both these and literature results. Terrace or step nucleation leads to laminar films, although with different relaxation patterns; combined step and terrace nucleation leads to rough films due to different upper-layer nucleation rates on the differently sized islands.

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页码：2380 / 2383

页数：4

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