VARIABLE-FREQUENCY AUTOMATIC CAPACITANCE-CONDUCTANCE SYSTEM FOR IMPURITY PROFILE AND DEEP LEVEL DETERMINATION

被引：4

作者：

ANDERSON, CL

BARON, R

CROWELL, CR

机构：

[1] HUGHES RES LABS, MALIBU, CA 90265 USA

[2] UNIV SO CALIF, DEPT ELECT ENGN, LOS ANGELES, CA 90007 USA

[3] UNIV SO CALIF, DEPT MAT SCI, LOS ANGELES, CA 90007 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1976年 / 47卷 / 11期

关键词：

D O I：

10.1063/1.1134526

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1366 / 1376

页数：11

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