ULTRAVIOLET LASER-INDUCED ION EMISSION FROM SILICON

被引：20

作者：

CHEN, L

LIBERMAN, V

ONEILL, JA

WU, Z

OSGOOD, RM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575719

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1426 / 1427

页数：2

共 16 条

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