ELECTROLYTIC ETCHING AND ELECTRON-MOBILITY OF GAAS FOR FETS

被引:47
作者
RODE, DL [1 ]
SCHWARTZ, B [1 ]
DILORENZO, JV [1 ]
机构
[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA
关键词
D O I
10.1016/0038-1101(74)90155-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1119 / 1123
页数:5
相关论文
共 15 条
  • [1] SI AND GAAS 0.5 MUM-GATE SCHOTTKY-BARRIER FIELD-EFFECT TRANSISTORS
    BAECHTOLD, W
    DAETWYLE.K
    FORSTER, T
    MOHR, TO
    WALTER, W
    WOLF, P
    [J]. ELECTRONICS LETTERS, 1973, 9 (10) : 232 - 234
  • [2] BAECHTOLD W, 1973, P INT SOLID ST CIRCU, V16, P156
  • [3] BECHTEL NG, 1972, MICROWAVE J, V15
  • [5] FAIR RB, UNPUBLISHED
  • [6] FUKUTA M, 1973, P INT SOLID ST CIRCU, V16, P84
  • [7] HOWER PL, 1971, SEMICONDUCTORS SEM A, V7, P147
  • [8] ANODIC-OXIDATION OF GAAS IN AQUEOUS H2O2 SOLUTION
    LOGAN, RA
    SCHWARTZ, B
    SUNDBURG, WJ
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) : 1385 - 1390
  • [9] NAPOLI LS, 1973, P INT SOLID ST CIRCU, V16, P82
  • [10] ELECTRON MOBILITY IN GE, SI, AND GAP
    RODE, DL
    [J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1972, 53 (01): : 245 - +