HIGH-TEMPERATURE DIFFRACTION GRATINGS FOR SYNCHROTRON RADIATION

被引：6

作者：

KITA, T

HARADA, T

MAEZAWA, H

MURAMATSU, Y

NAMBA, H

机构：

[1] HITACHI LTD, CENT RES LAB, KOKUBUNJI, TOKYO 185, JAPAN

[2] NATL LAB HIGH ENERGY PHYS, TSUKUBA, IBARAKI 305, JAPAN

[3] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, INTERDISCIPLINARY RES LABS, MUSASHINO, TOKYO 180, JAPAN

[4] UNIV TOKYO, SPECTROCHEM RES CTR, TOKYO 113, JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1143033

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

SiC-based mechanically ruled master gratings and replicas are developed for synchrotron radiation instruments. An SiC-based gold replica grating without any thermal deformation due to active cooling is used in a high-photon-flux-soft x-ray monochromator that is installed in a bending magnet beamline. An SiC-based gold master grating is used in a vacuum ultraviolet/soft x-ray monochromator installed in an undulator beamline with slight groove shape deformation. This deformation is caused by the thermal change of the gold film occurring at higher than 250-300-degrees-C. A method for cleaning carbon-contaminated synchrotron radiation optics is tested. The ultraviolet ozone ashing method effectively cleans carbon contamination on the optics and is useful for extending the lifetime of synchrotron radiation optics.

引用

页码：1424 / 1427

页数：4

共 7 条

[1] ULTRAVIOLET OZONE CLEANING OF A SOFT-X-RAY GRATING CONTAMINATED BY SYNCHROTRON RADIATION [J].