ULTRAVIOLET OZONE CLEANING OF A SOFT-X-RAY GRATING CONTAMINATED BY SYNCHROTRON RADIATION

被引：6

作者：

HARADA, T

YAMAGUCHI, S

ITOU, M

MITANI, S

MAEZAWA, H

MIKUNI, A

OKAMOTO, W

YAMAOKA, H

机构：

[1] HITACHI LTD,OME WORKS,OME,TOKYO 198,JAPAN

[2] OSAKA CITY UNIV,SUMIYOSHI KU,OSAKA 558,JAPAN

[3] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN

[4] INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

APPLIED OPTICS | 1991年 / 30卷 / 10期

关键词：

D O I：

10.1364/AO.30.001165

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

[No abstract available]

引用

页码：1165 / 1168

页数：4

共 8 条

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