INTERACTION BETWEEN PHOSPHOSILICATE GLASS-FILMS AND WATER

被引：44

作者：

NAGASIMA, N ^{[1
]}

SUZUKI, H ^{[1
]}

TANAKA, K ^{[1
]}

NISHIDA, S ^{[1
]}

机构：

[1] HITACHI LTD,SEMICOND & INTEGRATED CIRCUITS DIV,KODAIRA,TOKYO,JAPAN

来源：

关键词：

D O I：

10.1149/1.2401832

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：434 / 438

页数：5

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