APPARATUS FOR 3D SURFACE X-RAY-SCATTERING DURING IN-SITU MOLECULAR-BEAM DEPOSITION

被引：36

作者：

RENAUD, G

VILLETTE, B

GUENARD, P

机构：

[1] CEA-Département de Recherche Fondamentale sur la Matière Condensée, 38054 Grenoble Cédex 9, SP2M/PI

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 95卷 / 03期

关键词：

D O I：

10.1016/0168-583X(94)00600-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A novel surface diffractometer devoted to structural studies of surfaces and interfaces by X-ray scattering is described. It is composed of a very precise goniometer, onto which different UHV chambers can be rapidly aligned and interchanged without breaking the vacuum, thus allowing a more efficient use of the synchrotron X-ray beam, Two UHV chambers have been designed, one for horizontal sample surface, and one for vertical sample surface. The latter is equipped with all necessary tools to prepare the surface and perform molecular beam epitaxy at the same time as surface X-ray scattering. Both allow one to reach very large out-of-plane momentum transfer values with high accuracy.

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页码：422 / 430

页数：9

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