MICROSTRUCTURAL DEFECTS IN HYDROGEN IMPLANTED SILICON A TEM STUDY

被引：4

作者：

BEAUFORT, MF

GAREM, H

LEPINOUX, J

DESOYER, JC

机构：

[1] Laboratoire de Métallurgie Physique, URA 131 CNRS 40, 86000 Poitiers, Av. du Recteur Pineau

来源：

SCRIPTA METALLURGICA ET MATERIALIA | 1991年 / 25卷 / 05期

关键词：

D O I：

10.1016/0956-716X(91)90526-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1187 / 1192

页数：6

共 15 条

[1]

BEAUFORT MF, IN PRESS

[2]

BEAUFORT MF, 1990, THESIS U POITIERS FR

[3] STRUCTURAL STUDIES OF HYDROGEN-BOMBARDED SILICON USING ELLIPSOMETRY AND TRANSMISSION ELECTRON-MICROSCOPY [J].

COLLINS, RW ;

YACOBI, BG ;

JONES, KM ;

TSUO, YS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (02) :153-158

[4] PLANAR HELIUM BUBBLE ARRAYS IN NICKEL [J].

DOLIESLAEGER, M ;

DESCHEPPER, L ;

KNUYT, G ;

STALS, LM .

JOURNAL OF NUCLEAR MATERIALS, 1986, 138 (01) :27-30

[5] DIRECT EVIDENCE FOR HELIUM BUBBLE-GROWTH IN MOLYBDENUM BY THE MECHANISM OF LOOP PUNCHING [J].

EVANS, JH ;

VANVEEN, A ;

CASPERS, LM .

SCRIPTA METALLURGICA, 1981, 15 (03) :323-326

[6]

JOHNSON NM, 1987, PHYS REV B, V35, P4166, DOI 10.1103/PhysRevB.35.4166

[7] ON THE IDENTIFICATION OF THE VIBRATIONAL-SPECTRA IN HYDROGEN IMPLANTED CRYSTALLINE SILICON [J].

MUKASHEV, BN ;

NUSSUPOV, KH ;

TAMENDAROV, MF ;

FROLOV, VV .

PHYSICS LETTERS A, 1982, 87 (07) :376-380

[8] IDENTIFICATION OF HYDROGEN PLATELETS IN PROTON-BOMBARDED GAAS [J].

NEETHLING, JH ;

SNYMAN, HC .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) :941-945

[9] EXPERIMENTAL-EVIDENCE FOR BORON-HYDROGEN INTERACTION IN BORON-DOPED SILICON PASSIVATED WITH HYDROGEN [J].

PAJOT, B ;

CHARI, A ;

AUCOUTURIER, M ;

ASTIER, M ;

CHANTRE, A .

SOLID STATE COMMUNICATIONS, 1988, 67 (09) :855-858

[10] NEAR-SURFACE MICROSTRUCTURAL MODIFICATIONS IN LOW-ENERGY HYDROGEN-ION BOMBARDED SILICON [J].

PANITZ, JKG ;

SHARP, DJ ;

HILLS, CR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (01) :1-5

← 1 2 →