NEAR-SURFACE MICROSTRUCTURAL MODIFICATIONS IN LOW-ENERGY HYDROGEN-ION BOMBARDED SILICON

被引：25

作者：

PANITZ, JKG

SHARP, DJ

HILLS, CR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.573201

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1 / 5

页数：5

共 28 条

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