LOW-PRESSURE MICROWAVE GLOW-DISCHARGE PROCESS FOR HIGH DEPOSITION RATE AMORPHOUS-SILICON ALLOY

被引：10

作者：

HUDGENS, SJ

JOHNCOCK, AG

OVSHINSKY, SR

机构：

[1] Energy Conversion Devices Inc, Troy,, MI, USA, Energy Conversion Devices Inc, Troy, MI, USA

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷

关键词：

HYDROGENATED AND FLUORINATED AMORPHOUS SILICON - MICROWAVE GLOW DISCHARGE FILM DEPOSITION;

D O I：

10.1016/0022-3093(85)90783-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：809 / 812

页数：4

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