INCREASE OF LOW-FREQUENCY-NOISE-GENERATING DEFECTS IN TODAYS CMOS AND BICMOS TECHNOLOGIES

被引:4
作者
MURRAY, DC
SIABISHAHRIVAR, N
EVANS, AGR
REDMANWHITE, W
CARTER, JC
ALTRIP, JL
机构
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 4卷 / 1-4期
关键词
D O I
10.1016/0921-5107(89)90272-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:367 / 372
页数:6
相关论文
共 13 条
[1]   COMPARISON OF EXPERIMENTAL AND THEORETICAL RESULTS ON POLYSILICON EMITTER BIPOLAR-TRANSISTORS [J].
ASHBURN, P ;
SOEROWIRDJO, B .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (07) :853-860
[2]  
ASHBURN P, 1988, DESIGN REALIZATION B
[3]   EFFECT OF RTA ON THIN THERMAL OXIDE [J].
COSWAY, RG ;
HODEL, MW .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (02) :533-534
[4]   RAPID THERMAL-PROCESSING IN SEMICONDUCTOR TECHNOLOGY [J].
HART, MJ ;
EVANS, AGR .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1988, 3 (05) :421-436
[5]   A PHYSICAL MODEL FOR RANDOM TELEGRAPH SIGNAL CURRENTS IN SEMICONDUCTOR-DEVICES [J].
KANDIAH, K ;
DEIGHTON, MO ;
WHITING, FB .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (02) :937-948
[6]  
MCWHORTER AL, 1956, SEMICONDUCTOR SURFAC, P207
[7]   NOISE AND ELECTRICAL CHARACTERIZATION OF E-BEAM RAPID ISOTHERMALLY ANNEALED N-CHANNEL MOSFETS [J].
MURRAY, DC ;
EVANS, AGR ;
ALTRIP, JL ;
CARTER, JC .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1989, 4 (05) :393-398
[8]   NOISE CHARACTERISTICS OF ION-IMPLANTED MOS-TRANSISTORS [J].
NAKAMURA, K ;
KUDOH, O ;
KAMOSHIDA, M .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) :3189-3193
[10]  
SUN JYC, 1988, J PHYS, P401