SILANE PYROLYSIS RATES FOR THE MODELING OF CHEMICAL VAPOR-DEPOSITION

被引：68

作者：

MEYERSON, BS

JASINSKI, JM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 02期

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D O I：

10.1063/1.338180

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：785 / 787

页数：3

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