FILM THICKNESS DETERMINATION OF PMMA ON INP BY ELLIPSOMETRY

被引：2

作者：

SCHEPS, R ^{[1
]}

机构：

[1] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523

来源：

关键词：

D O I：

10.1149/1.2115623

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：540 / 543

页数：4

共 8 条

[1]

LEVI L, 1980, APPL OPTICS, V2, P918

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

[3]

MCCRACKIN FL, COMMUNICATION

[4]

OHAGAN P, 1978, KODAK PUBLICATION G, V48

[5] ELLIPSOMETRIC THICKNESS MEASUREMENTS OF PMMA ON GAAS [J].

SCHEPS, R .

[6]

SERAPHIN BO, 1967, SEMICONDUCT SEMIMET, V3, P530

[7]

WAGER JF, 1983, 10TH ANN C PHYS CHEM

[8] RHEOLOGY AND MODELING OF SPIN COATING PROCESS [J].

WASHO, BD .