共 9 条
[1]
LOW-ENERGY ANTIMONY IMPLANTATION IN SILICON .2. APPLICATIONS TO SCHOTTKY-BARRIER DIODE ADJUSTMENT AND TO ION-IMPLANTED RESISTORS
[J].
RADIATION EFFECTS AND DEFECTS IN SOLIDS,
1980, 47 (1-4)
:7-14
[2]
Eglash S. J., 1983, International Electron Devices Meeting 1983. Technical Digest, P119
[3]
MARSHALL ED, 1985, RES SOC S P, V47, P161
[4]
NICOLET MA, 1983, VLSI ELECTRONICS, V6, P6
[6]
Shone F. C., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P407
[8]
SZE SM, 1981, PHYSICS SEMICONDUCTO, pCH5