THE EFFECT OF OXYGEN ON THE GRAIN-BOUNDARY AND VOID STRUCTURE OF TITANIUM FILMS

被引：7

作者：

HIBBS, MK

SUNDGREN, JE

HENTZELL, HTG

机构：

来源：

THIN SOLID FILMS | 1984年 / 116卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(84)90422-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：177 / 189

页数：13

共 17 条

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