GENERATION OF LESS-THAN-50 NM PERIOD GRATINGS USING EDGE DEFINED TECHNIQUES

被引：55

作者：

FLANDERS, DC

EFREMOW, NN

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582643

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1105 / 1108

页数：4

共 10 条

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