IMPROVED METHOD FOR DETERMINING THE OPTICAL-CONSTANTS OF THIN-FILMS AND ITS APPLICATION TO MOLECULAR-BEAM-DEPOSITED POLYCRYSTALLINE LAYERS

被引:18
作者
MEREDITH, P
BULLER, GS
WALKER, AC
机构
[1] Department of Physics, Heriot-Watt University, Edinburgh, EH14 4AS, Riccarton
来源
APPLIED OPTICS | 1993年 / 32卷 / 28期
关键词
THIN FILMS; OPTICAL CONSTANTS; SPECTROSCOPY; MOLECULAR-BEAM DEPOSITION; ULTRAHIGH VACUUM; POLYCRYSTALLINE FILMS;
D O I
10.1364/AO.32.005619
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Polycrystalline, dielectric thin films are grown by the ultrahigh vacuum technique of molecular-beam deposition. A method of calculating the optical constants of such weakly absorbing, homogeneous layers from spectral transmission information alone, with no prior knowledge of their characteristics, is presented. Initially, the procedure uses transmission turning-point data to estimate refractive index and thickness by an analytical approach. These data are then fitted to a function that undergoes an iterative refinement routine by means of a weighted figure of merit to determine with good accuracy the film parameters as functions of wavelength. In this way the optimum conditions for the deposition of materials such as ZnS, ZnSe, LiF, CaF2, and BaF2 are found.
引用
收藏
页码:5619 / 5627
页数:9
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