HIGH SIGNAL-TO-NOISE LEVEL ION-BEAM-INDUCED CHARGE IMAGES

被引：11

作者：

BREESE, MBH

LAIRD, JS

MOLONEY, GR

SAINT, A

JAMIESON, DN

机构：

[1] School of Physics, University of Melbourne, M.A.R.K., Parkville

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 15期

关键词：

D O I：

10.1063/1.111756

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The use of MeV a particles to generate ion beam induced charge images with a signal to noise level approximately ten times larger than previously obtained using protons is described. The effect of a particle induced damage on the resultant image contrast is shown and a method of image formation in which the effects of ion induced damage are compensated for is described which enables the use of a higher ion dose.

引用

页码：1962 / 1964

页数：3

共 10 条

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 79 (1-4) :436-442

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