ION-BEAM DAMAGE-INDUCED MASKING FOR PHOTOELECTROCHEMICAL ETCHING OF III-V SEMICONDUCTORS

被引：8

作者：

CHI, GC

OSTERMAYER, FW

CUMMINGS, KD

HARRIOTT, LR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 11期

关键词：

D O I：

10.1063/1.337525

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4012 / 4014

页数：3

共 13 条

[1] USING FOCUSED ION-BEAM DAMAGE PATTERNS TO PHOTOELECTROCHEMICALLY ETCH FEATURES IN III-V-MATERIALS [J].

CUMMINGS, KD ;

HARRIOTT, LR ;

CHI, GC ;

OSTERMAYER, FW .

APPLIED PHYSICS LETTERS, 1986, 48 (10) :659-661

[2] DETECTION OF STRUCTURAL DEFECTS IN GAAS BY ELECTROCHEMICAL ETCHING [J].

FAKTOR, MM ;

STEVENSON, JL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (04) :621-629

[3] A LONG-WAVELENGTH, ANNULAR IN0.53GA0.47AS P-I-N PHOTODETECTOR [J].

FORREST, SR ;

KOHL, PA ;

PANOCK, R ;

DEWINTER, JC ;

NAHORY, RE ;

YANOWSKI, E .

ELECTRON DEVICE LETTERS, 1982, 3 (12) :415-417

[4] THE PHOTO-ELECTROCHEMICAL OXIDATION OF (100), (111), AND (111) N-INP AND N-GAAS [J].

KOHL, PA ;

WOLOWODIUK, C ;

OSTERMAYER, FW .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (11) :2288-2293

[5]

LASKOWSKI EJ, UNPUB

[6] IMPROVEMENTS IN THE MODULATION AMPLITUDE OF SUB-MICRON GRATINGS PRODUCED IN N-INP BY DIRECT PHOTOELECTROCHEMICAL ETCHING [J].

LUM, RM ;

OSTERMAYER, FW ;

KOHL, PA ;

GLASS, AM ;

BALLMAN, AA .

APPLIED PHYSICS LETTERS, 1985, 47 (03) :269-271

[7] HOLOGRAPHIC PHOTOELECTROCHEMICAL ETCHING OF DIFFRACTION GRATINGS IN N-INP AND N-GALNASP FOR DISTRIBUTED FEEDBACK LASERS [J].

LUM, RM ;

GLASS, AM ;

OSTERMAYER, FW ;

KOHL, PA ;

BALLMAN, AA ;

LOGAN, RA .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (01) :39-44

[8] HOLE TRANSPORT-EQUATION ANALYSIS OF PHOTOELECTROCHEMICAL ETCHING RESOLUTION [J].

OSTERMAYER, FW ;

KOHL, PA ;

LUM, RM .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (11) :4390-4396

[9] PHOTO-ELECTROCHEMICAL ETCHING OF INTEGRAL LENSES ON INGAASP/INP LIGHT-EMITTING-DIODES [J].

OSTERMAYER, FW ;

KOHL, PA ;

BURTON, RH .

APPLIED PHYSICS LETTERS, 1983, 43 (07) :642-644

[10] PHOTOELECTROCHEMICAL ETCHING OF PARA-GAAS [J].

OSTERMAYER, FW ;

KOHL, PA .

APPLIED PHYSICS LETTERS, 1981, 39 (01) :76-78

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