MASS-SPECTROMETRIC STUDY OF NEUTRAL-SPUTTERED SPECIES IN AN RF GLOW-DISCHARGE SPUTTERING SYSTEM

[1] PROCESS OF ION FORMATION FROM ATOMS EJECTED IN HYPEREXCITED ELECTRONIC STATES FROM IONIC BOMBARDMENT OF TRANSITION METALS [J]. JOURNAL DE PHYSIQUE, 1970, 31 (01): : 93 - &

[2] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE [J]. APPLIED PHYSICS LETTERS, 1971, 18 (10) : 435 - &

[3] GLOW-DISCHARGE MASS-SPECTROMETRY - TECHNIQUE FOR DETERMINING ELEMENTAL COMPOSITION PROFILES IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) : 1779 - 1786

[4] COBURN JW, TO BE PUBLISHED

[5] SPECTRAL INTERFERENCES IN SECONDARY ION MASS-SPECTROMETRY [J]. APPLIED SPECTROSCOPY, 1973, 27 (04) : 274 - 279

[6] MASS-SPECTROMETRIC STUDY OF SPUTTERING OF SINGLE CRYSTALS OF GAAS BY LOW-ENERGY A IONS [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) : 2956 - &

[7] SPUTTERING OF SURFACES BY POSITIVE ION BEAMS OF LOW ENERGY [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (03) : 549 - 555

[8] HONIG RE, 1962, 5TH P INT C ION PHEN, P106

[9] REACTIONS OF EXCITED ATOMS AND MOLECULES WITH ATOMS AND MOLECULES .2. ENERGY ANALYSIS OF PENNING ELECTRONS [J]. ZEITSCHRIFT FUR PHYSIK, 1969, 228 (01): : 68 - &

[10] Jones E. G., 1970, International Journal of Mass Spectrometry and Ion Physics, V5, P137, DOI 10.1016/0020-7381(70)87012-7

[1] PROCESS OF ION FORMATION FROM ATOMS EJECTED IN HYPEREXCITED ELECTRONIC STATES FROM IONIC BOMBARDMENT OF TRANSITION METALS [J]. JOURNAL DE PHYSIQUE, 1970, 31 (01): : 93 - &

[2] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE [J]. APPLIED PHYSICS LETTERS, 1971, 18 (10) : 435 - &

[3] GLOW-DISCHARGE MASS-SPECTROMETRY - TECHNIQUE FOR DETERMINING ELEMENTAL COMPOSITION PROFILES IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) : 1779 - 1786

[4] COBURN JW, TO BE PUBLISHED

[5] SPECTRAL INTERFERENCES IN SECONDARY ION MASS-SPECTROMETRY [J]. APPLIED SPECTROSCOPY, 1973, 27 (04) : 274 - 279

[6] MASS-SPECTROMETRIC STUDY OF SPUTTERING OF SINGLE CRYSTALS OF GAAS BY LOW-ENERGY A IONS [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) : 2956 - &

[7] SPUTTERING OF SURFACES BY POSITIVE ION BEAMS OF LOW ENERGY [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (03) : 549 - 555

[8] HONIG RE, 1962, 5TH P INT C ION PHEN, P106

[9] REACTIONS OF EXCITED ATOMS AND MOLECULES WITH ATOMS AND MOLECULES .2. ENERGY ANALYSIS OF PENNING ELECTRONS [J]. ZEITSCHRIFT FUR PHYSIK, 1969, 228 (01): : 68 - &

[10] Jones E. G., 1970, International Journal of Mass Spectrometry and Ion Physics, V5, P137, DOI 10.1016/0020-7381(70)87012-7