MICROELECTRONIC AND MEDICAL APPLICATIONS OF AN ION-BEAM MILLING SYSTEM

被引：8

作者：

KOWALSKI, ZW

RANGELOW, IW

机构：

来源：

关键词：

D O I：

10.1007/BF00745572

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：741 / 752

页数：12

共 17 条

[1]

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[2]

BANKS BA, 1976, NASA TM X73512

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[5]

DARLINSKI A, 1981, 26 INT WISS KOLL, V2, P67

[6]

GLOERSEN G, 1976, SOLID STATE TECHNOL, P68

[7] ION-BEAM TEXTURING [J].

HUDSON, WR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :286-289

KOWALSKI, ZW .

KOWALSKI, ZW .

[10] MICROFABRICATION BY ION-BEAM ETCHING [J].

LEE, RE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :164-170