REPRODUCIBLE LEAKY TUBE DIFFUSION OF ZINC INTO GAAS WITH SUB-MICRON JUNCTION DEPTHS

被引：13

作者：

ROEDEL, RJ

EDWARDS, JL

RIGHTER, A

HOLM, P

ERKAYA, H

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 07期

关键词：

D O I：

10.1149/1.2115947

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1726 / 1729

页数：4

共 14 条

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[7] FORMATION OF P+-LAYER IN GAAS BY DUAL IMPLANTATION OF ZN AND AS [J].

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[8] REDISTRUBUTION OF ZN IMPLANTED INTO GAAS [J].

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