OPTICAL-PROPERTIES OF POLYIMIDE DURING ARF EXCIMER-LASER ABLATION

被引：4

作者：

HAHN, DW

PETTIT, GH

EDIGER, MN

机构：

[1] FDA Center for Devices and Radiological Health, HFZ-134, Rockville, MD 20857

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 03期

关键词：

D O I：

10.1063/1.357702

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Reflectivity measurements of the backsurface of thin polyimide films indicate a transient decrease in reflectivity during ArF (193 nm) excimer laser ablation. The posterior surface reflectivity is decreased by 20%-40% over the range of incident laser fluences from 75 to 175 mJ/cm2, respectively. The results are discussed within the framework of a theoretical model of saturable absorption, and calculations are presented which are in good agreement with the experimental' results. It is concluded that the observed decrease in reflectivity is the result of transient changes in the optical properties within the solid polymer material which occur during ultraviolet laser ablation.

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页码：1830 / 1832

页数：3

相关论文

共 13 条

[1] EXCIMER LASER ETCHING OF POLYIMIDE [J].

BRANNON, JH ;

LANKARD, JR ;

BAISE, AI ;

BURNS, F ;

KAUFMAN, J .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043

[2] NANOSECOND PHOTOACOUSTIC STUDIES ON ULTRAVIOLET-LASER ABLATION OF ORGANIC POLYMERS [J].

DYER, PE ;

SRINIVASAN, R .

APPLIED PHYSICS LETTERS, 1986, 48 (06) :445-447

[3] TIME-RESOLVED REFLECTIVITY OF ARF LASER-IRRADIATED POLYIMIDE [J].

EDIGER, MN ;

PETTIT, GH .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) :3510-3514

[4] CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS [J].

GORODETSKY, G ;

KAZYAKA, TG ;

MELCHER, RL ;

SRINIVASAN, R .

APPLIED PHYSICS LETTERS, 1985, 46 (09) :828-830

[5]

Kortum G, 1969, SPECTROSCOPY-US

[6] THRESHOLD BEHAVIOR IN POLYIMIDE PHOTOABLATION - SINGLE-SHOT RATE MEASUREMENTS AND SURFACE-TEMPERATURE MODELING [J].

KUPER, S ;

BRANNON, J ;

BRANNON, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 56 (01) :43-50

[7] TIME-RESOLVED REFLECTIVITY AS A PROBE OF THE DYNAMICS OF LASER ABLATION OF ORGANIC POLYMERS [J].

PARASKEVOPOULOS, G ;

SINGLETON, DL ;

IRWIN, RS ;

TAYLOR, RS .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (04) :1938-1946

[8] FLUENCE-DEPENDENT TRANSMISSION OF POLYIMIDE AT 248 NM UNDER LASER ABLATION CONDITIONS [J].

PETTIT, GH ;

SAUERBREY, R .

APPLIED PHYSICS LETTERS, 1991, 58 (08) :793-795

[9]

PETTIT GH, IN PRESS APPL PHYS A

[10] TIME-RESOLVED ABLATION-SITE PHOTOGRAPHY OF XECL-LASER IRRADIATED POLYIMID [J].

SIMON, P .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1989, 48 (03) :253-256