PLASMA-ASSISTED VAPOR-DEPOSITION PROCESSES AND SOME APPLICATIONS

被引：8

作者：

BUNSHAH, RF

DESHPANDEY, CV

机构：

来源：

SURFACE & COATINGS TECHNOLOGY | 1986年 / 27卷 / 01期

关键词：

D O I：

10.1016/0257-8972(86)90040-X

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1 / 21

页数：21

共 69 条

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