THE EFFECT OF O-2 ON REACTIVELY SPUTTERED ZINC-OXIDE

被引：90

作者：

AITA, CR

PURDES, AJ

LAD, RJ

FUNKENBUSCH, PD

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 10期

关键词：

D O I：

10.1063/1.327472

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5533 / 5536

页数：4

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共 34 条

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