OPTICAL CHARACTERIZATION OF POROUS SILICON BY SYNCHROTRON-RADIATION REFLECTANCE SPECTRA ANALYSES

被引：79

作者：

KOSHIDA, N ^{[1
]}

KOYAMA, H ^{[1
]}

SUDA, Y ^{[1
]}

YAMAMOTO, Y ^{[1
]}

ARAKI, M ^{[1
]}

SAITO, T ^{[1
]}

SATO, K ^{[1
]}

SATA, N ^{[1
]}

SHIN, S ^{[1
]}

机构：

[1] UNIV TOKYO,INST SOLID STATE PHYS,TANASHI,TOKYO 182,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 20期

关键词：

D O I：

10.1063/1.110330

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electronic structure of porous Si(PS) has been characterized by optical reflectance spectra analyses. The reflectance spectra of PS were measured in the photon energy range of 2-27 eV using a synchrotron radiation source. The reflectance at the low energy region was calibrated by the corresponding absolute value which was separately determined from spectroscopic ellipsometry. The spectral response of optical constants were calculated by the Kramers-Kronig analysis. Our results indicate that PS retains some of the characteristic optical features of crystalline Si, and that a blue shift in the absorption edge occurs in PS.

引用

页码：2774 / 2776

页数：3

共 21 条

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