SUBSTRATE AND TARGET VOLTAGE EFFECTS ON SPUTTERED HYDROGENATED AMORPHOUS-SILICON

被引：3

作者：

MCGRUER, N

REINHARD, DK

机构：

来源：

SOLAR ENERGY MATERIALS | 1985年 / 11卷 / 5-6期

关键词：

D O I：

10.1016/0165-1633(85)90015-2

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：447 / 454

页数：8

共 21 条

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[10]

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