COATING OF STEEL BY PLASMA-ACTIVATED METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION IN THE SI-C SYSTEM

被引：20

作者：

LELOGEAIS, M

DUCARROIR, M

机构：

[1] CNRS-IMP, Université, 66860 Perpignan, Avenue de Villeneuve

来源：

THIN SOLID FILMS | 1991年 / 197卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(91)90236-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In order to obtain a surface modification of 35CD4 steel (4135 steel) for tribilogical applications, experiments have been carried out in a tubular reactor by r.f. glow discharge (inductive process) from tetramethylsilane diluted in an argon flow. The influence of deposition parameters was investigated using statistically designed experiments and then parametric studies regarding deposition temperature and total pressure were carried out. The effects of these parameters on deposition rate and coating composition are presented and discussed in terms of basic phenomena in the plasma. Characterization of the coatings with various spectroscopic methods is presented.

引用

页码：257 / 267

页数：11

共 21 条

[1]

ANDERSON A, 1976, PHILOS MAG, V85, P1

[2] RECENT ADVANCES IN CERAMIC COATINGS OBTAINED BY CHEMICAL VAPOR-DEPOSITION AND PLASMA PROCESSING DEPOSITION [J].