ELECTRICAL-PROPERTIES OF HIGHLY CONDUCTING AND TRANSPARENT THIN-FILMS OF MAGNETRON SPUTTERED SNO2

被引：35

作者：

GOODCHILD, RG

WEBB, JB

WILLIAMS, DF

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 06期

关键词：

D O I：

10.1063/1.334331

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2308 / 2310

页数：3

共 12 条

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[3] THE INFLUENCE OF TARGET OXIDATION AND GROWTH-RELATED EFFECTS ON THE ELECTRICAL-PROPERTIES OF REACTIVELY SPUTTERED FILMS OF TIN-DOPED INDIUM OXIDE [J].

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[4]

CHOPRA KL, 1983, THIN FILM SOLAR CELL, P326

[5] PROCESS STUDY OF CHEMICALLY VAPOUR-DEPOSITED SNOX (X-ALMOST-EQUAL-TO-2) FILMS [J].

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[6] THIN METALLIC OXIDES AS TRANSPARENT CONDUCTORS [J].

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[7]

MURTY NS, 1982, THIN SOLID FILMS, V92, P347, DOI 10.1016/0040-6090(82)90159-6

[8]

SHRANTHI E, 1982, J APPL PHYS, V53, P1615

[9] X-RAY-DIFFRACTION ANALYSIS OF SNO2 FILMS PREPARED BY OXIDATION OF TIN FILMS [J].

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[10] STRUCTURAL, ELECTRICAL AND OPTICAL-PROPERTIES OF RF-MAGNETRON-SPUTTERED SNO2-SB FILM [J].

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