THE INFLUENCE OF TARGET OXIDATION AND GROWTH-RELATED EFFECTS ON THE ELECTRICAL-PROPERTIES OF REACTIVELY SPUTTERED FILMS OF TIN-DOPED INDIUM OXIDE

被引：54

作者：

BUCHANAN, M

WEBB, JB

WILLIAMS, DF

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 04期

关键词：

D O I：

10.1016/0040-6090(81)90604-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：373 / 382

页数：10

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