MECHANISM OF GRAPHITE BAFFLE GETTERING IN ORGANOMETALLIC VAPOR-PHASE EPITAXY - ADSORPTION OF TRIMETHYLALUMINUM ON GRAPHITE

被引：9

作者：

KISKER, DW ^{[1
]}

STEVENSON, DA ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1983年 / 12卷 / 02期

关键词：

D O I：

10.1007/BF02651143

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：459 / 482

页数：24

相关论文

共 14 条

[1] ADAMSON AW, 1976, PHYSICAL CHEM SURFAC, P553
[2] LOW THRESHOLD, HIGH-EFFICIENCY GA1-XALXAS SINGLE QUANTUM WELL VISIBLE DIODE-LASERS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
BURNHAM, RD
SCIFRES, DR
STREIFER, W
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (03) : 228 - 230
[3] HIGH-ENERGY ALXGA1-XAS (0 LESS-THAN-OR-EQUAL-TO X LESS-THAN-OR-EQUAL-TO 0.1) QUANTUM-WELL HETEROSTRUCTURE LASER OPERATION
CAMRAS, MD
HOLONYAK, N
HESS, K
COLEMAN, JJ
BURNHAM, RD
SCIFRES, DR
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (04) : 317 - 319
[4] PHYSICAL ADSORPTION OF OXYGEN ON GRAPHITE - NEW GRAPH FOR DIRECT DETERMINATION OF DIFFERENTIAL CHANGE IN ENTROPY OF ADSORPTION
DERICBOURG, J
[J]. SURFACE SCIENCE, 1976, 59 (02) : 554 - 564
[5] GAS-DYNAMICS OF A CONICAL NOZZLE MOLECULAR-BEAM SAMPLING SYSTEM
DUN, H
MATTES, BL
STEVENSON, DA
[J]. CHEMICAL PHYSICS, 1979, 38 (02) : 161 - 172
[6] PREPARATION AND PROPERTIES OF GA1-XALXAS-GAAS HETEROSTRUCTURE LASERS GROWN BY METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION
DUPUIS, RD
DAPKUS, PD
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1979, 15 (03) : 128 - 135
[7] HOM G, COMMUNICATION
[8] KISKER D, 1979, 7TH P INT C CHEM VAP, P30
[9] OXYGEN GETTERING BY GRAPHITE BAFFLES DURING ORGANO-METALLIC VAPOR-PHASE EPITAXIAL ALGAAS GROWTH
KISKER, DW
MILLER, JN
STRINGFELLOW, GB
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (07) : 614 - 616
[10] KISKER DW, 1982, AUG P INT C REL EP G