MICROSCOPIC IDENTIFICATION OF DEFECTS PROPAGATING THROUGH THE CENTER OF SILICON AND INDIUM-DOPED LIQUID ENCAPSULATED CZOCHRALSKI GROWN GAAS USING X-RAY TOPOGRAPHY

被引:19
作者
SCOTT, MP [1 ]
LADERMAN, SS [1 ]
ELLIOT, AG [1 ]
机构
[1] HEWLETT PACKARD CO,DIV OPTOELECTR,SAN JOSE,CA 95131
关键词
D O I
10.1063/1.96304
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1280 / 1282
页数:3
相关论文
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