SHOT NOISE ERRORS IN REGISTRATION FOR ELECTRON LITHOGRAPHY

[1] CUMMING D, 1981, MICROCIRCUIT ENG 80, P75

[2] REGISTRATION MARK DETECTION FOR ELECTRON-BEAM LITHOGRAPHY-EL1 SYSTEM [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 545 - 553

[3] FLAVIN PG, 1981, MICROCIRCUIT ENG 81, P129

[4] A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1229 - 1233

[5] HSU TJ, 1981, HEWLETT-PACKARD J, V32, P34

[6] ELECTRON LITHOGRAPHY FOR THE FABRICATION OF MICROELECTRONIC DEVICES [J]. REPORTS ON PROGRESS IN PHYSICS, 1985, 48 (06) : 795 - 851

[7] SCHWARTZ M, 1970, INFORMATION TRANSMIS

[8] WELLS OC, 1965, IEEE T ELECTRON DEV, V25, P556

[1] CUMMING D, 1981, MICROCIRCUIT ENG 80, P75

[2] REGISTRATION MARK DETECTION FOR ELECTRON-BEAM LITHOGRAPHY-EL1 SYSTEM [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 545 - 553

[3] FLAVIN PG, 1981, MICROCIRCUIT ENG 81, P129

[4] A PATTERN-RECOGNITION TECHNIQUE USING SEQUENCES OF MARKS FOR REGISTRATION IN ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1229 - 1233

[5] HSU TJ, 1981, HEWLETT-PACKARD J, V32, P34

[6] ELECTRON LITHOGRAPHY FOR THE FABRICATION OF MICROELECTRONIC DEVICES [J]. REPORTS ON PROGRESS IN PHYSICS, 1985, 48 (06) : 795 - 851

[7] SCHWARTZ M, 1970, INFORMATION TRANSMIS

[8] WELLS OC, 1965, IEEE T ELECTRON DEV, V25, P556