IMAGING ZONE PLATES FOR X-RAY MICROSCOPY FABRICATED BY ELECTRON-BEAM LITHOGRAPHY

被引：5

作者：

UNGER, P ^{[1
]}

BOGLI, V ^{[1
]}

BENEKING, H ^{[1
]}

NIEMANN, B ^{[1
]}

GUTTMANN, P ^{[1
]}

机构：

[1] UNIV GOTTINGEN,FORSCH GRP RONTGENMIKROSKOPIE,D-3400 GOTTINGEN,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.583989

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：323 / 327

页数：5

共 16 条

[1]

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[3]

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[4]

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[5] X-RAY PHASE LENS DESIGN AND FABRICATION [J].

CEGLIO, NM ;

HAWRYLUK, AM ;

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[6]

CEGLIO NM, 1980, ANN NY ACAD SCI, V342, P65

[7] PRACTICAL ASPECTS OF MICROFABRICATION IN THE 100 NM REGIME [J].

KERN, DP ;

HOUZEGO, PJ ;

COANE, PJ ;

CHANG, THP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1096-1100

[8]

KRATSCHMER E, 1983, 1983 P MICR ENG, P15

[9]

KRATSCHMER E, 1984, 1984 P MICR ENG, P203

[10]

MICHETTE AG, 1984, XRAY MICROSCOPY, P109

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