TEXTURING OF POLY(ETHYLENE-TEREPHTHALATE) FILM SURFACES BY SPUTTER ETCHING

被引：16

作者：

CROSS, JH ^{[1
]}

LEMAY, MW ^{[1
]}

MCCLURE, DJ ^{[1
]}

机构：

[1] THREE M CO,CENT RES,PROC TECHNOL LAB,ST PAUL,MN 55144

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.572978

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：495 / 498

页数：4

共 11 条

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[8] MECHANISM OF SILICON ETCHING BY A CF4 PLASMA
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