CHARACTERIZATION OF HARD TRANSPARENT B-C-N-H THIN-FILMS FORMED BY PLASMA CHEMICAL-VAPOR DEPOSITION AT ROOM-TEMPERATURE

被引：30

作者：

MONTASSER, K ^{[1
]}

HATTORI, S ^{[1
]}

MORITA, S ^{[1
]}

机构：

[1] MEIJO UNIV,DEPT ELECT ENGN,TEMPAKU KU,NAGOYA,AICHI 468,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 08期

关键词：

D O I：

10.1063/1.335826

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3185 / 3189

页数：5

共 7 条

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