DOPANT INCORPORATION STUDIES IN SILICON MOLECULAR-BEAM EPITAXY (SI MBE)

被引：11

作者：

ALLEN, FG

IYER, SS

METZGER, RA

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来源：

APPLICATIONS OF SURFACE SCIENCE | 1982年 / 11-2卷 / JUL期

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D O I：

10.1016/0378-5963(82)90096-4

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页码：517 / 527

页数：11

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