TIN-NITROGEN FILMS OBTAINED VIA REACTIVE CATHODE SPUTTERING - IDENTIFICATION OF AMORPHOUS PHASE, SN3N4

被引：23

作者：

REMY, JC ^{[1
]}

HANTZPERGUE, JJ ^{[1
]}

机构：

[1] FAC SCI ANGERS,UER SCI & TECH,LAB PHYSICO-CHIM MIN & THERMODYNAM,BLVD LAVOISIER,49045 ANGERS,FRANCE

来源：

THIN SOLID FILMS | 1975年 / 30卷 / 02期

关键词：

D O I：

10.1016/0040-6090(75)90084-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：197 / 204

页数：8

相关论文

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