OPTICAL-CONSTANTS OF PALLADIUM SILICIDES MEASURED BY A MULTIPLE-WAVELENGTH ELLIPSOMETER

被引：16

作者：

LUE, JT ^{[1
]}

CHEN, HW ^{[1
]}

LEW, SI ^{[1
]}

机构：

[1] NATL TSING HUA UNIV,DEPT ELECT ENGN,HSINCHU 300,TAIWAN

来源：

PHYSICAL REVIEW B | 1986年 / 34卷 / 08期

关键词：

D O I：

10.1103/PhysRevB.34.5438

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：5438 / 5442

页数：5

共 11 条

[1]

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[2]

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CHEN, HW ;

LUE, JT .

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[4]

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[5] METAL-SILICON INTERFACE FORMATION - THE NI-SI AND PD-SI SYSTEMS [J].

GRUNTHANER, PJ ;

GRUNTHANER, FJ ;

MADHUKAR, A ;

MAYER, JW .

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[6]

HODGSON JN, 1970, OPTICAL ABSORPTION D, P64

[7]

LUE JT, 1983, SOLID STATE ELECTRON, V26, P787

[8]

LYNCH DW, 1985, HDB OPTICAL CONSTANT, P317

[9] INFRARED OPTICAL-CONSTANTS OF PTSI [J].

PIMBLEY, JM ;

KATZ, W .

APPLIED PHYSICS LETTERS, 1983, 42 (11) :984-986

[10] AN ABSOLUTE MEASUREMENT OF OPTICAL REFLECTIVITY BY MODIFICATION OF A WMS SYSTEM [J].

SHAW, SY ;

LUE, JT .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1981, 14 (10) :1135-1136

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