LOPOS - ADVANCED DEVICE ISOLATION FOR A 0.8 MU-M CMOS BULK PROCESS TECHNOLOGY

被引：19

作者：

GHEZZO, M

KAMINSKY, E

NISSANCOHEN, Y

FRANK, P

SAIA, R

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 07期

关键词：

D O I：

10.1149/1.2097120

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1992 / 1996

页数：5

共 21 条

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