THE ELECTRICAL-PROPERTIES OF AS+-IMPLANTED SNOX FILMS

被引：3

作者：

LOU, JC

LIN, MS

机构：

来源：

THIN SOLID FILMS | 1983年 / 110卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90170-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：21 / 28

页数：8

共 9 条

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