DYNAMIC ALTERATIONS OF THE SURFACE-COMPOSITION DURING SPUTTERING OF SILICIDES

被引：34

作者：

WIRTH, T

ATZRODT, V

LANGE, H

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 82卷 / 02期

关键词：

D O I：

10.1002/pssa.2210820215

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：459 / 466

页数：8

共 28 条

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